Research Catalog
Plasma techniques for film deposition
- Title
- Plasma techniques for film deposition / Mitsuharu Konuma.
- Author
- Konuma, Mitsuharu, 1950-
- Publication
- Harrow, U.K. : Alpha Science International, c2005.
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| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Request in advance | JSE 06-939 | Offsite |
Details
- Description
- ix, 337 p. : ill.; 25 cm.
- Subject
- Note
- "[Originally published in 1992 as] Film deposition by plasma techniques, Springer-Verlag ... Some of the contents, especially the first half ... is based upon the old book ... however, many parts of the text and figures have been completely updated and revised"--Pref.
- Bibliography (note)
- Includes bibliographical references (p. 273-323) and index.
- Call Number
- JSE 06-939
- ISBN
- 184265151X
- OCLC
- 61459616
- Author
- Konuma, Mitsuharu, 1950-
- Title
- Plasma techniques for film deposition / Mitsuharu Konuma.
- Imprint
- Harrow, U.K. : Alpha Science International, c2005.
- Bibliography
- Includes bibliographical references (p. 273-323) and index.
- Added Author
- Konuma, Mitsuharu, 1950- Film deposition by plasma techniques.
- Research Call Number
- JSE 06-939