- Additional Authors
- Description
- 15 p. : ill.; 28 cm.
- Series Statement
- NASA technical memorandum ; 102544
- Subject
- Note
- Bibliography (note)
- Includes bibliographical references (p. 13).
- Additional Formats (note)
- Also available via Internet from the NASA Technical Report Server web site. Address as of 5/9/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900011077%5F1990011077.pdf ; current access is available via PURL.
- Reproduction (note)
- Call Number
- GPO Microfiche NAS 1.15:102544
- OCLC
- marcive25060756
- Title
Electron beam induced damage in PECVD Si₃N₄ and SiO₂ films on InP [microform] / Dragan M. Pantic ... [et al.] ; presented at the Dielectric Films on Compound Semiconductors Symposium sponsored by the Electrochemical Society, Honolulu, Hawaii, October 18-23, 1987.
- Imprint
[Washington, D.C.] : NASA ; Springfield, Va. : For sale by the National Technical Information Service, [1990]
- Series
NASA technical memorandum ; 102544
- Bibliography
Includes bibliographical references (p. 13).
- Additional Formats
Also available via Internet from the NASA Technical Report Server web site. Address as of 5/9/06: http://ntrs.nasa.gov/archive/nasa/casi.ntrs.nasa.gov/19900011077%5F1990011077.pdf ; current access is available via PURL.
- Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration], 1990. 1 microfiche : negative.
- Connect to:
- Added Author
Pantic, Dragan M.
Electrochemical Society.
United States. National Aeronautics and Space Administration.
Symposium on Dielectric Films on Compound Semiconductors.
- Gpo Item No.
0830-D (MF)
0830-D (online)
- Sudoc No.
NAS 1.15:102544
- Research Call Number
GPO Microfiche NAS 1.15:102544
GPO Internet NAS 1.15:102544