Research Catalog
Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices
- Title
- Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices / edited by Evgeni Gusev.
- Author
- NATO Advanced Research Workshop on Defects in High-K Dielectric Nano-electronic Semiconductor Devices (2005 : Saint Petersburg, Russia)
- Publication
- Dordrecht : Springer, c2006.
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Details
- Additional Authors
- Gusev, Evgeni.
- Description
- x, 492 p. : ill.; 25 cm.
- Series Statement
- NATO science series. v. 220
- Subjects
- Note
- "Proceedings of the NATO Advanced Research Workshop on Defects in Advanced High-k Dielectric Nano-electronic Semiconductor Devices, held July 11-14, 2005, in St. Petersburg, Russia."--Colophon.
- Bibliography (note)
- Includes bibliographical references and indexes.
- Call Number
- JSE 06-1179
- ISBN
- 1402043651 (hd. bd.)
- LCCN
- 2006382648
- 9781402043659
- 8791402043673
- OCLC
- 65207807
- Conference
- NATO Advanced Research Workshop on Defects in High-K Dielectric Nano-electronic Semiconductor Devices (2005 : Saint Petersburg, Russia)
- Title
- Defects in high-k gate dielectric stacks : nano-electronic semiconductor devices / edited by Evgeni Gusev.
- Imprint
- Dordrecht : Springer, c2006.
- Series
- NATO science series. Series II. Mathematics, physics and chemistry ; v. 220
- Bibliography
- Includes bibliographical references and indexes.
- Added Author
- Gusev, Evgeni.
- Other Standard Identifier
- 97814020436598791402043673 (e-book)
- Research Call Number
- JSE 06-1179