Research Catalog

Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006

Title
Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006 / editors, Karen J. Kirkby ... [et al.].
Publication
Melville, N.Y. : American Institute of Physics, c2006.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance JSF 07-305Offsite

Details

Additional Authors
Kirkby, Karen J.
Description
xvii, 664 p. : ill.; 28 cm.
Series Statement
AIP conference proceedings, 0094-243X ; v. 866
Uniform Title
AIP conference proceedings ; no. 866.
Alternative Title
IIT 2006
Subjects
Bibliography (note)
  • Includes bibliographical references and index.
Contents
Doping processes in semiconductors -- Cluster implantation in doping -- PIII and plasma doping -- Materials : novel techniques and applications -- Implant technology -- Implant technology (materials) -- Process control & yield -- Process control & yield (metrology) -- Materials.
Call Number
JSF 07-305
ISBN
  • 9780735403659
  • 0735403651
LCCN
2006935319
OCLC
77535657
Title
Ion implantation technology : 16th International Conference on Ion Implantation Technology, IIT 2006, Marseille, France, 11-16 June 2006 / editors, Karen J. Kirkby ... [et al.].
Imprint
Melville, N.Y. : American Institute of Physics, c2006.
Series
AIP conference proceedings, 0094-243X ; v. 866
AIP conference proceedings ; no. 866.
Bibliography
Includes bibliographical references and index.
Added Author
Kirkby, Karen J.
Research Call Number
JSF 07-305
View in Legacy Catalog