Research Catalog

Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films

Title
Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films [microform] / John J. Pouch, Samuel A. Alterovitz, and Joseph D. Warner.
Author
Pouch, John J.
Publication
[Cleveland, Ohio : National Aeronautics and Space Administration, Lewis Research Center, 1986]

Details

Additional Authors
  • Alterovitz, Samuel A.
  • Warner, Joseph D.
  • Lewis Research Center.
Description
1 v.
Series Statement
NASA technical memorandum ; 87258
Subject
  • Amorphous semiconductors
  • Boron nitride
  • Amorphous materials
  • Boron nitrides
  • Carbon
  • Dielectrics
  • Plasma diodes
  • Semiconductor devices
Reproduction (note)
  • Microfiche.
Call Number
GPO Microfiche NAS 1.15:87258
OCLC
marcive162511576
Author
Pouch, John J.
Title
Auger electron spetroscopy, secondary ion mass spectrometry and optical characterization of a-C:H and BN films [microform] / John J. Pouch, Samuel A. Alterovitz, and Joseph D. Warner.
Imprint
[Cleveland, Ohio : National Aeronautics and Space Administration, Lewis Research Center, 1986]
Series
NASA technical memorandum ; 87258
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration], 1986. 1 microfiche.
Added Author
Alterovitz, Samuel A.
Warner, Joseph D.
Lewis Research Center.
Gpo Item No.
0830-D (MF)
Sudoc No.
NAS 1.15:87258
Research Call Number
GPO Microfiche NAS 1.15:87258
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