- Additional Authors
- United States. National Aeronautics and Space Administration.
- Description
- 1 v.
- Series Statement
- NASA technical memorandum ; NASA TM-77998
- Uniform Title
- NASA technical memorandum ; 77998.
- Subject
- Reproduction (note)
- Call Number
- GPO Microfiche NAS 1.15:77998
- OCLC
- marcive241297742
- Author
Casajus, A.
- Title
Apparatus for edge etching of semiconductor wafers [microform] / Casajus, A.
- Imprint
Washington, D.C. : National Aeronautics and Space Administration, [1986]
- Series
NASA technical memorandum ; NASA TM-77998
NASA technical memorandum ; 77998.
- Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration, 1986]. 1 microfiche.
- Added Author
United States. National Aeronautics and Space Administration.
- Gpo Item No.
0830-D (MF)
- Sudoc No.
NAS 1.15:77998
- Research Call Number
GPO Microfiche NAS 1.15:77998