Research Catalog

Optimization of PbTiO₃ seed layers for PZT MEMS actuators

Title
Optimization of PbTiO₃ seed layers for PZT MEMS actuators / Luz Sanchez and Ronald G. Polcawich.
Author
Sanchez, Luz.
Publication
Adelphi, MD : Army Research Laboratory, [2008]

Available Online

https://purl.fdlp.gov/GPO/LPS109119

Details

Additional Authors
  • Polcawich, Ronald G.
  • U.S. Army Research Laboratory.
Description
vi, 22 pages : digital, PDF file.
Series Statement
ARL-TR ; 4697
Uniform Title
ARL-TR (Aberdeen Proving Ground, Md.) ; 4697.
Subject
  • Ferroelectric crystals
  • Ferroelectric thin films
Note
  • Title from title screen (viewed Feb. 19, 2009).
  • "December 2008."
Bibliography (note)
  • Includes bibliographical references (page 20).
Type of Report (note)
  • Summary;
System Details (note)
  • Mode of access: Internet from ARL web site. Address as of 2/19/2009: http://www.arl.army.mil/arlreports/2008/ARL-TR-4697.pdf; current access via PURL.
Call Number
GPO Internet D 101.133:4697
OCLC
marcive309886255
Author
Sanchez, Luz.
Title
Optimization of PbTiO₃ seed layers for PZT MEMS actuators / Luz Sanchez and Ronald G. Polcawich.
Publisher
Adelphi, MD : Army Research Laboratory, [2008]
Type of Content
text
Type of Medium
computer
Type of Carrier
online resource
Series
ARL-TR ; 4697
ARL-TR (Aberdeen Proving Ground, Md.) ; 4697.
System Details
Mode of access: Internet from ARL web site. Address as of 2/19/2009: http://www.arl.army.mil/arlreports/2008/ARL-TR-4697.pdf; current access via PURL.
Type Of Report
Summary; May to September 2008.
Bibliography
Includes bibliographical references (page 20).
Connect to:
https://purl.fdlp.gov/GPO/LPS109119
Added Author
Polcawich, Ronald G.
U.S. Army Research Laboratory.
Gpo Item No.
0324-A-01 (online)
Sudoc No.
D 101.133:4697
View in Legacy Catalog