Research Catalog

Title

Thermal characterization of thin films for MEMS applications / by David J. Howe and Brian Morgan.

Author

Howe, David J.

Publication

Adelphi, Md. : Army Research Laboratory, [2008]

Details

Additional Authors

• Morgan, Brian.
• U.S. Army Research Laboratory.

Description

iv, 14 pages : digital, PDF file.

Series Statement

ARL-TR ; 4378

Uniform Title

ARL-TR (Aberdeen Proving Ground, Md.) ; 4378.

Alternative Title

Thermal characterization of thin films for microelectromechanical systems applications

Subject

Microelectromechanical systems

Note

• Title from title screen (viewed on May 26, 2009).
• "February 2008."

System Details (note)

• Mode of access: Internet from the ARL web site. Address as of 5/26/09: http://www.arl.army.mil/arlreports/2008/ARL-TR-4378.pdf; current access is available via PURL.

Call Number

GPO Internet D 101.133:4378

OCLC

marcive351779555

Author

Howe, David J.

Title

Thermal characterization of thin films for MEMS applications / by David J. Howe and Brian Morgan.

Publisher

Adelphi, Md. : Army Research Laboratory, [2008]

Type of Content

text

Type of Medium

computer

Type of Carrier

online resource

Series

ARL-TR ; 4378

ARL-TR (Aberdeen Proving Ground, Md.) ; 4378.

System Details

Mode of access: Internet from the ARL web site. Address as of 5/26/09: http://www.arl.army.mil/arlreports/2008/ARL-TR-4378.pdf; current access is available via PURL.

Connect to:

https://purl.fdlp.gov/GPO/LPS113054

Added Author

Morgan, Brian.

U.S. Army Research Laboratory.

Gpo Item No.

0324-A-01 (online)

Sudoc No.

D 101.133:4378