Research Catalog

Surface acoustic wave/silicon monolithic sensor/processor

Title
Surface acoustic wave/silicon monolithic sensor/processor [microform] / Stephen T. Kowel ... [et al.].
Publication
Syracuse, NY : Dept. of Electrical and Computer Engineering, Syracuse University, [1983]

Details

Additional Authors
  • Kowel, Stephen T.
  • Syracuse University. Dept. of Electrical & Computer Engineering.
  • United States. National Aeronautics and Space Administration.
Description
vii, 115 p. : ill.; 25 cm.
Series Statement
NASA CR ; 174541
Uniform Title
NASA contractor report ; NASA CR-174541.
Subject
  • Deposition
  • Piezoelectric crystals
  • Sputtering
  • Surface acoustic wave devices
  • Zinc oxides
Note
  • Cover title.
  • "September, 1983."
Bibliography (note)
  • Includes bibliographical references (p. 113-115).
Type of Report (note)
  • Final report.
Reproduction (note)
  • Microfiche.
Funding (note)
  • NASA Grant no.
Call Number
GPO Microfiche NAS 1.26:174541
OCLC
marcive704533763
Title
Surface acoustic wave/silicon monolithic sensor/processor [microform] / Stephen T. Kowel ... [et al.].
Imprint
Syracuse, NY : Dept. of Electrical and Computer Engineering, Syracuse University, [1983]
Series
NASA CR ; 174541
NASA contractor report ; NASA CR-174541.
Bibliography
Includes bibliographical references (p. 113-115).
Type Of Report
Final report.
Reproduction
Microfiche. [Washington, D.C. : National Aeronautics and Space Administration], 1984. 2 microfiches.
Funding
NASA Grant no. NSG1611
Added Author
Kowel, Stephen T.
Syracuse University. Dept. of Electrical & Computer Engineering.
United States. National Aeronautics and Space Administration.
Other Form:
Paper version: Surface acoustic wave/silicon monolithic sensor/processor. (OCoLC)12903416
Gpo Item No.
0830-H-14 (MF)
Sudoc No.
NAS 1.26:174541
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