Research Catalog

Title

Microlithography world [electronic resource].

Publication

Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, [1992]-2008.

Details

Additional Authors

Society of Photo-Optical Instrumentation Engineers.

Publication Date

• Vol. 1, no. 1 (Mar./Apr. 1992)-
• Ceased with v. 17, no. 4 (Nov. 2008).

Uniform Title

Microlithography world (Online)

Alternative Title

• Microlithogr. world
• Microlithography world

Subject

• Semiconductors > Design and construction > Periodicals
• Microlithography > Periodicals
• Masks (Electronics) > Periodicals

Note

• Title from cover.
• Published: Tulsa, OK, Oct., Nov., Dec. 1993-

Access (note)

• License restrictions may limit access.

File Type (note)

• Text (electronic journal).

Source of Description (note)

• Latest issue consulted: Vol. 4, no. 2 (spring 1995).

ISSN

1074-407X

LCCN

93659127

OCLC

ssj0017235

Title

Microlithography world [electronic resource].

Imprint

Port Washington, N.Y. : Penn Well Publication, published in cooperation with SPIE, [1992]-2008.

Current Frequency

Quarterly, Jan./Feb./Mar. 1993-

Former Frequency

Bimonthly, Mar./Apr. 1992-<Sept./Oct. 1992>

Access

License restrictions may limit access.

File Type

Text (electronic journal).

Connect to:

Available from home with a valid library card

Available onsite at NYPL

Added Author

Society of Photo-Optical Instrumentation Engineers.

Abbreviated Title

Microlithogr. world