Research Catalog

Workshop summary report : scanning probe nanolithography workshop

Title
Workshop summary report : scanning probe nanolithography workshop / John A. Dagata, Hiroshi Yokoyama, Francesc Perez-Murano.
Publication
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2003]

Available Online

https://purl.fdlp.gov/GPO/gpo96144

Details

Additional Authors
  • Dagata, John A.
  • Perez-Murano, Francesc.
  • Yokoyama, Hiroshi.
  • Manufacturing Engineering Laboratory (U.S.)
Description
1 online resource (86 pages) : illustrations.
Series Statement
NISTIR ; 7040
Uniform Title
NISTIR ; 7040.
Subject
Nanoelectronics
Note
  • "January 2003."
  • Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
  • Title from page [1], viewed April 6, 2007.
Bibliography (note)
  • Includes bibliographical references.
Call Number
GPO Internet C 13.58:7040
LCCN
GOVPUB-C13-2a595f0c484316cf83fd83c867fe2926
OCLC
marcive124074935
Title
Workshop summary report : scanning probe nanolithography workshop / John A. Dagata, Hiroshi Yokoyama, Francesc Perez-Murano.
Publisher
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2003]
Type of Content
text
Type of Medium
computer
Type of Carrier
online resource
Series
NISTIR ; 7040
NISTIR ; 7040.
Bibliography
Includes bibliographical references.
Connect to:
https://purl.fdlp.gov/GPO/gpo96144
Added Author
Dagata, John A.
Perez-Murano, Francesc.
Yokoyama, Hiroshi.
Manufacturing Engineering Laboratory (U.S.)
Other Standard Identifier
GOVPUB-C13-2a595f0c484316cf83fd83c867fe2926
Gpo Item No.
0247-D (online)
Sudoc No.
C 13.58:7040
View in Legacy Catalog