- Additional Authors
- Description
- 1 online resource (86 pages) : illustrations.
- Series Statement
- NISTIR ; 7040
- Uniform Title
- NISTIR ; 7040.
- Subject
- Nanoelectronics
- Note
- "January 2003."
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from page [1], viewed April 6, 2007.
- Bibliography (note)
- Includes bibliographical references.
- Call Number
- GPO Internet C 13.58:7040
- LCCN
- GOVPUB-C13-2a595f0c484316cf83fd83c867fe2926
- OCLC
- marcive124074935
- Title
Workshop summary report : scanning probe nanolithography workshop / John A. Dagata, Hiroshi Yokoyama, Francesc Perez-Murano.
- Publisher
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2003]
- Type of Content
text
- Type of Medium
computer
- Type of Carrier
online resource
- Series
NISTIR ; 7040
NISTIR ; 7040.
- Bibliography
Includes bibliographical references.
- Connect to:
- Added Author
Dagata, John A.
Perez-Murano, Francesc.
Yokoyama, Hiroshi.
Manufacturing Engineering Laboratory (U.S.)
- Other Standard Identifier
GOVPUB-C13-2a595f0c484316cf83fd83c867fe2926
- Gpo Item No.
0247-D (online)
- Sudoc No.
C 13.58:7040