- Additional Authors
- Description
- 1 online resource (17 pages) : illustrations.
- Series Statement
- NISTIR ; 7236
- Uniform Title
- NISTIR ; 7236.
- Subject
- Semiconductor wafers > Standards
- Note
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from page 1, viewed April 6, 2007.
- Bibliography (note)
- Includes bibliographical references.
- Call Number
- GPO Internet C 13.58:7236
- LCCN
- GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6
- OCLC
- marcive124075057
- Title
A Framework for standard modular simulation : application to semiconductor wafer fabrication / Heshan Li [and others].
- Publisher
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2005]
- Type of Content
text
- Type of Medium
computer
- Type of Carrier
online resource
- Series
NISTIR ; 7236
NISTIR ; 7236.
- Bibliography
Includes bibliographical references.
- Connect to:
- Added Author
Fernandez, Emmanuel.
Leong, Swee K.
Li, Heshan.
McLean, Charles R. (Charles Robert)
Ramirez-Hernandez, Jose A.
National Institute of Standards and Technology (U.S.)
- Other Standard Identifier
GOVPUB-C13-1d7d08a33cb9fca929f3de4019a1ceb6
- Gpo Item No.
0247-D (online)
- Sudoc No.
C 13.58:7236