Research Catalog

Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects

Title
Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects / A. Emre Yarimbiyik [and others].
Publication
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2006]

Available Online

https://purl.fdlp.gov/GPO/gpo99378

Details

Additional Authors
  • Allen, Ricky.
  • Blackburn, David L.
  • Schafft, Harry A.
  • Yarimbiyik, A. Emre.
  • Zaghloul, Mona E.
  • National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division.
Description
1 online resource (21 unnumbered pages) : illustrations.
Series Statement
NISTIR ; 7234
Uniform Title
NISTIR ; 7234.
Subject
  • Nanoelectromechanical systems
  • Thin films > Size effects > Computer simulation
Note
  • "February 2006."
  • Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
  • Title from page [1], viewed March 7, 2007.
Bibliography (note)
  • Includes bibliographical references.
Call Number
GPO Internet C 13.58:7234
LCCN
GOVPUB-C13-752d1bed8ba5e339a5dbbbe7614cc375
OCLC
marcive123128229
Title
Implementation of simulation program for modeling the effective resistivity of nanometer scale film and line interconnects / A. Emre Yarimbiyik [and others].
Publisher
[Gaithersburg, MD] : U.S. Dept. of Commerce, National Institute of Standards and Technology, [2006]
Type of Content
text
Type of Medium
computer
Type of Carrier
online resource
Series
NISTIR ; 7234
NISTIR ; 7234.
Bibliography
Includes bibliographical references.
Connect to:
https://purl.fdlp.gov/GPO/gpo99378
Added Author
Allen, Ricky.
Blackburn, David L.
Schafft, Harry A.
Yarimbiyik, A. Emre.
Zaghloul, Mona E.
National Institute of Standards and Technology (U.S.). Semiconductor Electronics Division.
Other Standard Identifier
GOVPUB-C13-752d1bed8ba5e339a5dbbbe7614cc375
Gpo Item No.
0247-D (online)
Sudoc No.
C 13.58:7234
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