Research Catalog

Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy

Title
Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday.
Publication
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2014.

Available Online

https://purl.fdlp.gov/GPO/gpo95549

Details

Additional Authors
  • Crowley, Chris J.
  • Johnson, Aaron N.
  • Pope, Jodie G.
  • Wright, John D.
  • Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.))
Description
1 online resource (315 pages) : illustrations (black and white).
Series Statement
NIST special publication ; 1170
Uniform Title
NIST special publication ; 1170.
Subject
  • Metrology
  • Microscopy
Note
  • "January 2014."
  • Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
  • Title from PDF title page (viewed February 6, 2014).
Bibliography (note)
  • Includes bibliographical references.
Call Number
GPO Internet C 13.10:1170
LCCN
GOVPUB-C13-1cb45ab96fd9b91901073fab856dd6db
OCLC
marcive870343714
Title
Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday.
Publisher
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2014.
Type of Content
text
Type of Medium
computer
Type of Carrier
online resource
Series
NIST special publication ; 1170
NIST special publication ; 1170.
Bibliography
Includes bibliographical references.
Connect to:
https://purl.fdlp.gov/GPO/gpo95549
Added Author
Crowley, Chris J.
Johnson, Aaron N.
Pope, Jodie G.
Wright, John D.
Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.))
Other Standard Identifier
GOVPUB-C13-1cb45ab96fd9b91901073fab856dd6db
Gpo Item No.
0247 (online)
Sudoc No.
C 13.10:1170
View in Legacy Catalog