- Additional Authors
- Description
- 1 online resource (315 pages) : illustrations (black and white).
- Series Statement
- NIST special publication ; 1170
- Uniform Title
- NIST special publication ; 1170.
- Subject
- Note
- "January 2014."
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page (viewed February 6, 2014).
- Bibliography (note)
- Includes bibliographical references.
- Call Number
- GPO Internet C 13.10:1170
- LCCN
- GOVPUB-C13-1cb45ab96fd9b91901073fab856dd6db
- OCLC
- marcive870343714
- Title
Documentation for Reference Material (RM) 8820 : a versatile, multipurpose dimensional metrology calibration standard for scanned particle beam, scanned probe, and optical microscopy / Michael T. Postek, Andras E. Vladar, Bin Mang, Benjamin Bunday.
- Publisher
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 2014.
- Type of Content
text
- Type of Medium
computer
- Type of Carrier
online resource
- Series
NIST special publication ; 1170
NIST special publication ; 1170.
- Bibliography
Includes bibliographical references.
- Connect to:
- Added Author
Crowley, Chris J.
Johnson, Aaron N.
Pope, Jodie G.
Wright, John D.
Physical Measurement Laboratory (National Institute of Standards and Technology (U.S.))
- Other Standard Identifier
GOVPUB-C13-1cb45ab96fd9b91901073fab856dd6db
- Gpo Item No.
0247 (online)
- Sudoc No.
C 13.10:1170