- Additional Authors
- Description
- 1 online resource.
- Series Statement
- NBS special publication ; 337
- Uniform Title
- NBS special publication ; 337.
- Subject
- Silicon > Congresses
- Note
- 1970.
- Contributed record: Metadata reviewed, not verified. Some fields updated by batch processes.
- Title from PDF title page.
- Bibliography (note)
- Includes bibliographical references.
- Call Number
- GPO Internet C 13.10:337
- LCCN
- GOVPUB-C13-7f7b7f480faf28e8dfb51215fb51c9e3
- OCLC
- marcive926740965
- Author
Marsden, Charles P.
- Title
Silicon device processing / Charles P. Marsden.
- Publisher
Gaithersburg, MD : U.S. Dept. of Commerce, National Institute of Standards and Technology, 1970.
- Type of Content
text
- Type of Medium
computer
- Type of Carrier
online resource
- Series
NBS special publication ; 337
NBS special publication ; 337.
- Bibliography
Includes bibliographical references.
- Connect to:
- Added Author
Marsden, Charles P.
United States. National Bureau of Standards.
- Other Standard Identifier
GOVPUB-C13-7f7b7f480faf28e8dfb51215fb51c9e3
- Gpo Item No.
0247 (online)
- Sudoc No.
C 13.10:337