Research Catalog

Advances in resist technology and processing VIII : 4-5 March 1991, San Jose, California

Title
Advances in resist technology and processing VIII : 4-5 March 1991, San Jose, California / Hiroshi Ito, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1991], ©1991.

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Details

Additional Authors
  • Ito, Hiroshi.
  • Society of Photo-optical Instrumentation Engineers.
  • SPIE Symposium on Microlithography (1991 : San Jose, Calif.)
Description
xii, 679 pages : illustrations; 28 cm.
Series Statement
SPIE proceedings series, 0277-786X ; v. 1466
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1466.
Subject
Note
  • "Papers presented at the eighth conference on Advances in Resist Technology and Processing, held March 4-5 as part of the 1991 SPIE Symposium on Microlithography"--Introd.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819405655
LCCN
91061057
OCLC
  • 24150723
  • ocm24150723
Owning Institutions
Columbia University Libraries