Research Catalog

Proceedings of the Eighth Symposium on Plasma Processing

Title
Proceedings of the Eighth Symposium on Plasma Processing / edited by G.S. Mathad and D.W. Hess.
Author
Symposium on Plasma Processing (8th : 1990 : Montréal, Québec)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1990], ©1990.

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Holdings

Details

Additional Authors
  • Mathad, G. S.
  • Hess, Dennis W.
  • Electrochemical Society. Dielectric Science and Technology Division.
  • Electrochemical Society. Electronics Division.
Description
xi, 787 pages : illustrations; 23 cm.
Series Statement
Proceedings / The Electrochemical Society ; v. 90-14
Uniform Title
Proceedings (Electrochemical Society) ; v. 90-14.
Alternative Title
Plasma processing.
Subjects
Note
  • "Dielectric Science and Technology and Electronics divisions."
Bibliography (note)
  • Includes bibliographical references and indexes.
LCCN
90084188
OCLC
  • 22663840
  • ocm22663840
Owning Institutions
Columbia University Libraries