Research Catalog

The physics of submicron lithography

Title
The physics of submicron lithography / Kamil A. Valiev.
Author
Valiev, K. A. (Kamilʹ Akhmetovich)
Publication
New York : Plenum Press, [1992], ©1992.

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Details

Description
xi, 493 pages : illustrations; 26 cm.
Series Statement
Microdevices
Uniform Title
Microdevices.
Subject
  • Lithography, Electron beam
  • X-ray lithography
  • Ion beam lithography
  • Physics
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0306435780
LCCN
91041122
OCLC
  • 24845420
  • ocm24845420
Owning Institutions
Columbia University Libraries