Research Catalog

Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A.

Title
Rapid thermal and integrated processing : symposium held April 30-May 3, 1991, Anaheim, California, U.S.A. / editors, Jeffrey C. Gelpey [and others].
Publication
Pittsburgh, Pa. : Materials Research Society, [1991], ©1991.

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Details

Additional Authors
  • Gelpey, Jeffrey C.
  • Materials Research Society.
Description
xv, 504 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 224
Uniform Title
Materials Research Society symposia proceedings ; v. 224.
Subject
  • Semiconductors > Heat treatment > Congresses
  • Semiconductor doping > Congresses
  • Vapor-plating > Congresses
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558991182
LCCN
91026829
OCLC
  • 24173290
  • ocm24173290
Owning Institutions
Columbia University Libraries