Research Catalog

Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings

Title
Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines, and robots : proceedings / IEEE, Travemünde, Germany, 4 February-7 February 1992 ; W. Benecke, H.-C. Petzold, eds. ; sponsored by the IEEE Robotics and Automation Society, and in cooperation with the German IEEE Section.
Publication
[New York, N.Y.] : Institute of Electrical and Electronics Engineers, [1992], ©1992.

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Additional Authors
  • Benecke, W. (Wolfgang)
  • Petzold, H.-C. (Hans-Christian)
  • IEEE Robotics and Automation Society.
  • Institute of Electrical and Electronics Engineers. German Section.
  • IEEE Workshop on Micro Electro Mechanical Systems (5th : 1992 : Travemünde, Lübeck, Germany)
Description
xv, 240 pages : illustrations; 28 cm
Subjects
Note
  • Papers presented at the fifth IEEE Workshop on Micro Electro Mechanical Systems.
  • "IEEE catalog number 92CH3093-2."
  • Cover title: 1992 IEEE micro electro mechanical systems workshop.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
  • 0780304977 (softbound)
  • 0780304985 (casebound)
  • 0780304993 (microfiche)
LCCN
91058683
OCLC
ocm26103771
Owning Institutions
Columbia University Libraries