Research Catalog

Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California

Title
Rapid thermal and integrated processing : 10-11 September 1991, San Jose, California / Mehrdad M. Moslehi, Rajendra Singh, Dim-Lee Kwong, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash. : SPIE, [1992], ©1992.

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Details

Additional Authors
  • Moslehi, Mehrdad M.
  • Singh, Rajendra, 1946-
  • Kwong, Dim-Lee.
  • Society of Photo-optical Instrumentation Engineers.
Description
ix, 207 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 1595
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1595.
Subjects
Note
  • "Part of a two-conference program ... held at SPIE's 1991 Symposium on Microelectronic Processing Integration, 9-13 September 1991"--P. ix.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0819407267
LCCN
91067548
OCLC
  • 25684134
  • ocm25684134
Owning Institutions
Columbia University Libraries