Research Catalog
Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California
- Title
- Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California / Michael T. Postek, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash., USA : SPIE, [1992], ©1992.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7874 .I5554 1992g | Off-site |
Holdings
Details
- Additional Authors
- Description
- xi, 697 pages : illustrations; 28 cm.
- Series Statement
- Proceedings / SPIE--the International Society for Optical Engineering ; v. 1673
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1673.
- Subject
- Note
- "Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992."--P. xi.
- Bibliography (note)
- Includes bibliographical references and index.
- ISBN
- 081940828X
- OCLC
- ocm26187031
- Owning Institutions
- Columbia University Libraries