Research Catalog

Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California

Title
Integrated circuit metrology, inspection, and process control VI : 9-11 March 1992, San Jose, California / Michael T. Postek, chair/editor ; sponsored by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [1992], ©1992.

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Details

Additional Authors
  • Postek, Michael T.
  • Society of Photo-optical Instrumentation Engineers.
  • SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control (6th : 1992 : San Jose, Calif.)
Description
xi, 697 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 1673
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1673.
Subject
  • Integrated circuits > Congresses
  • Measurement > Congresses
Note
  • "Papers presented at the Sixth Annual SPIE Conference on Integrated Circuit Metrology, Inspection, and Process Control, which took place in San Jose, California, 9-12 March 1992."--P. xi.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
081940828X
OCLC
ocm26187031
Owning Institutions
Columbia University Libraries