Research Catalog

Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology

Title
Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology / edited by G.R. Srinivasan, J.D. Plummer, S.T. Pantelides ; [sponsored by] Electronics and Dielectric Science and Technology Divisions.
Author
International Symposium on Process Physics and Modeling in Semiconductor Technology (2nd : 1990 : Montréal, Québec)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1991], ©1991.

Items in the Library & Off-site

Filter by

1 Item

StatusFormatAccessCall NumberItem Location
Request for On-site UseRequest Scan
How do I pick up this item and when will it be ready?
TextRequest in advance TK7871.85 .I579 1991Off-site

Holdings

Details

Additional Authors
  • Srinivasan, G. R.
  • Plummer, J.
  • Pantelides, Sokrates T.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectric Science and Technology Division.
Description
x, 800 pages : illustrations; 23 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 91-4
Uniform Title
Proceedings (Electrochemical Society) ; v. 91-4.
Alternative Title
Process physics and modeling in semiconductor technology.
Subject
Semiconductors > Mathematical models > Congresses
Note
  • Spine title: Process physics and modeling in semiconductor technology.
  • Papers from a symposium held in Montréal, Québec, May, 1990.
Bibliography (note)
  • Includes bibliographical references and indexes.
LCCN
90085817
OCLC
ocm23255824
Owning Institutions
Columbia University Libraries