Research Catalog

Proceedings of the Seventh Symposium on Automated Integrated Circuits Manufacturing

Title
Proceedings of the Seventh Symposium on Automated Integrated Circuits Manufacturing / edited by Vaughn E. Akins, Hiroyuki Harada.
Author
Symposium on Automated Integrated Circuits Manufacturing (7th : 1991 : Phoenix, Ariz.)
Publication
Pennington, NJ : Electrochemical Society, [1992], ©1992.

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Details

Additional Authors
  • Akins, Vaughn E.
  • Harada, Hiroyuki.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectric Science and Technology Division.
Description
ix, 283 pages : illustrations; 23 cm.
Series Statement
Proceedings / the Electrochemical Society ; v. 92-8
Uniform Title
Proceedings (Electrochemical Society) ; v. 92-8.
Alternative Title
Automated integrated circuits manufacturing.
Subjects
Note
  • "Electronics and Dielectric Science and Technology divisions."
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1566770041
LCCN
92070529
OCLC
  • 26055637
  • ocm26055637
Owning Institutions
Columbia University Libraries