Research Catalog
Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
- Title
- Proceedings of the Second International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / edited by Jerzy Ruzyllo, Richard E. Novak ; [sponsored by the] Electronics and Dielectric Science and Technology divisions.
- Author
- International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (2nd : 1992 : Phoenix, Ariz.)
- Publication
- Pennington, NJ : Electrochemical Society, [1992], ©1992.
Items in the Library & Off-site
Filter by
1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7871.85 .I5824 1992 | Off-site |
Holdings
Details
- Additional Authors
- Description
- xi, 502 pages : illustrations; 23 cm.
- Series Statement
- Proceedings (Electrochemical Society) ; v. 92-12
- Uniform Title
- Proceedings (Electrochemical Society) ; v. 92-12.
- Alternative Title
- Cleaning technology in semiconductor device manufacturing.
- Subject
- Semiconductor wafers > Cleaning > Congresses
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 1566770122
- LCCN
- 92071447
- OCLC
- 26674259
- ocm26674259
- Owning Institutions
- Columbia University Libraries