Research Catalog
Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 192, San Francisco, California, U.S.A.
- Title
- Chemical surface preparation, passivation, and cleaning for semiconductor growth and processing : symposium held April 27-29, 192, San Francisco, California, U.S.A. / editors, Robert J. Nemanich ... [and others].
- Publication
- Pittsburgh, Pa. : Materials Research Society, 1992.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7871.85 .C4765 1992 | Off-site |
Holdings
Details
- Additional Authors
- Nemanich, R. J. (Robert J.)
- Description
- xiii, 529 pages : illustrations; 24 cm.
- Series Statement
- Materials Research Society symposium proceedings ; v. 259
- Uniform Title
- Materials Research Society symposia proceedings ; v. 259.
- Subjects
- Bibliography (note)
- Includes bibliographical references and indexes.
- ISBN
- 1558991549
- LCCN
- 92026767
- OCLC
- 26403313
- ocm26403313
- Owning Institutions
- Columbia University Libraries