Research Catalog

Proceedings of the Ninth Symposium on Plasma Processing

Title
Proceedings of the Ninth Symposium on Plasma Processing / edited by G.S. Mathad, D.W. Hess.
Author
Symposium on Plasma Processing (9th : 1992 : Saint Louis, Mo.)
Publication
Pennington, NJ : Electrochemical Society, [1992], ©1992.

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Details

Additional Authors
  • Mathad, G. S.
  • Hess, Dennis W.
  • Electrochemical Society. Dielectric Science and Technology Division.
  • Electrochemical Society. Electronics Division.
Description
xiii, 654 pages : illustrations; 23 cm.
Series Statement
Proceedings ; v. 92-18
Uniform Title
Proceedings (Electrochemical Society) ; 92-18.
Alternative Title
Plasma processing.
Subjects
Note
  • "Dielectric Science and Technology and Electronics Divisions."
  • Spine title: Plasma processing.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1566770203
LCCN
92082777
OCLC
  • 26886559
  • ocm26886559
Owning Institutions
Columbia University Libraries