Research Catalog

The physics of micro/nano-fabrication

Title
The physics of micro/nano-fabrication / Ivor Brodie and Julius J. Muray.
Author
Brodie, Ivor.
Publication
New York : Plenum Press, [1992], ©1992.

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TextRequest in advance TK7874 .B725 1992Off-site

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Details

Additional Authors
Muray, Julius J.
Description
xix, 650 pages : illustrations; 26 cm.
Series Statement
Microdevices
Uniform Title
Microdevices.
Subject
  • Microelectronics
  • Thin-film circuits
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
0306441462
LCCN
92028941
OCLC
  • 26398446
  • ocm26398446
Owning Institutions
Columbia University Libraries