Research Catalog

Stress-induced phenomena in metallization : first international workshop, Ithaca, NY, 1991

Title
Stress-induced phenomena in metallization : first international workshop, Ithaca, NY, 1991 / editors, Che-Yu Li, Paul Tolta, Paul S. Ho.
Publication
New York : American Institute of Physics, [1992], ©1992.

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Details

Additional Authors
  • Li, Che-Yu.
  • Totta, Paul.
  • Ho, P. S.
Description
vii, 280 pages : illustrations; 25 cm.
Series Statement
  • Conference proceedings ; no. 263
  • American Vacuum Society series ; 13
Uniform Title
  • AIP conference proceedings ; no. 263.
  • American Vacuum Society series ; 13.
Subject
  • Semiconductors > Defects > Congresses
  • Metallic films > Congresses
  • Thin film devices > Defects > Congresses
  • Aluminum films > Congresses
Note
  • "DOE CONF-9109327"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
1563960826
LCCN
92072292
OCLC
ocm27937326
Owning Institutions
Columbia University Libraries