Research Catalog

Multilayer and grazing incidence x-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California

Title
Multilayer and grazing incidence x-ray/EUV optics for astronomy and projection lithography : 19-22 July 1992, San Diego, California / Richard B. Hoover, Arthur B.C. Walker, chairs/editors ; sponsored and published by SPIE--The International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE--the International Society for Optical Engineering, [1993], ©1993.

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Details

Additional Authors
  • Hoover, Richard B.
  • Walker, A. B. C.
  • Society of Photo-optical Instrumentation Engineers.
Description
xiii, 702 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; 1742
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1742.
Subjects
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819409154 (pbk.)
LCCN
92085063
OCLC
ocm27398838
Owning Institutions
Columbia University Libraries