Research Catalog

Chemical perspectives of microelectric materials III

Title
Chemical perspectives of microelectric materials III / editors, C.R. Abernathy [and others].
Publication
Pittsburg, Pa. : Materials Research Society, 1993.

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Additional Authors
Abernathy, C. R.
Description
xv, 727 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings ; v. 282
Uniform Title
Materials Research Society symposia proceedings ; v. 282.
Subject
  • Microelectronics > Materials > Congresses
  • Semiconductors > Congresses
  • Surface chemistry > Congresses
Note
  • Proceedings of a symposium held Nov. 30-December 1992, Boston, Massachussetts, USA.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
1558991778
LCCN
93020201
OCLC
  • 502595319
  • ocn502595319
Owning Institutions
Columbia University Libraries