Research Catalog

Proceedings of the Symposia on Patterning Science and Technology II

Title
Proceedings of the Symposia on Patterning Science and Technology II / edited by Wayne Greene, George J. Hefferon, L. K. White [and] Interconnection and Contact Metallization for ULSI / edited by Terry O. Herndon, Andrew L. Wu ; [sponsored by the] Dielectric Science and Technology and Electronics divisions.
Author
International Symposium on Patterning Science and Technology (2nd : 1991 : Phoenix, Ariz.)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2896) : Electrochemical Society, [1992], ©1992.

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Additional Authors
  • Greene, Wayne, 1965-
  • Hefferon, George J.
  • White, L. K.
  • Herndon, Terry O.
  • Wu, Andrew L.
  • Electrochemical Society. Dielectric Science and Technology Division.
  • Electrochemical Society. Electronics Division.
  • Interconnection and Contact Metallization for ULSI Symposium (1991 : Phoenix, Ariz.)
Description
x, 382 pages : illustrations; 24 cm.
Series Statement
Proceedings ; v. 92-6
Uniform Title
Proceedings (Electrochemical Society) ; v. 92-6.
Alternative Title
  • Interconnection and contact metallization for ULSI.
  • Patterning science and technology II.
Subject
  • Microelectronics > Congresses
  • Microlithography > Congresses
  • Photoresists > Congresses
  • Masks (Electronics) > Congresses
  • Integrated circuits > Large scale integration > Congresses
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
1566770076
LCCN
92071002
OCLC
  • 502605458
  • ocn502605458
Owning Institutions
Columbia University Libraries