Research Catalog
Rapid thermal processing : science and technology
- Title
- Rapid thermal processing : science and technology / Richard B. Fair.
- Author
- Fair, Richard B.
- Publication
- Boston : Academic Press, [1993], ©1993.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7871.85 .F299 1993 | Off-site |
Holdings
Details
- Description
- viii, 430 pages : illustrations; 24 cm
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- 1. Rapid Thermal Processing - A Justification / Richard B. Fair -- 2. Rapid Thermal Processing-Based Epitaxy / J. L. Hoyt -- 3. Rapid Thermal Growth and Processing of Dielectrics / Hisham Z. Massoud -- 4. Thin-Film Deposition / Mehmet C. Ozturk -- 5. Extended Defects from Ion Implantation and Annealing / Kevin S. Jones and George A. Rozgonyi -- 6. Junction Formation in Silicon by Rapid Thermal Annealing / Richard B. Fair -- 7. Silicides / C. M. Osburn -- 8. Issues in Manufacturing Unique Silicon Devices Using Rapid Thermal Annealing / B. Lojek -- 9. Manufacturing Equipment Issues in Rapid Thermal Processing / Fred Roozeboom.
- ISBN
- 0122476905 (acid-free paper)
- LCCN
- 93006882
- OCLC
- 27432101
- ocm27432101
- Owning Institutions
- Columbia University Libraries