Research Catalog
Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California
- Title
- Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California / Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
- Publication
- Bellingham, Wash., USA : SPIE, [1993], ©1993.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | TK7874 .S845 1993g | Off-site |
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Details
- Additional Authors
- Description
- ix, 344 pages : illustrations; 28 cm.
- Series Statement
- Proceedings / SPIE--the International Society for Optical Engineering ; v. 1805
- Uniform Title
- Proceedings of SPIE--the International Society for Optical Engineering ; v. 1805.
- Subject
- Bibliography (note)
- Includes bibliographies and author index.
- ISBN
- 0819410039 (pbk.)
- LCCN
- 92062654
- OCLC
- ocm28271722
- Owning Institutions
- Columbia University Libraries