Research Catalog

Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California

Title
Submicrometer metallization : the challenges, opportunities, and limitations : 23-25 September 1992, San Jose, California / Thomas Kwok, Takamaro Kikkawa, Krishna Shenai, chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [1993], ©1993.

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Additional Authors
  • Kwok, Thomas.
  • Kikkawa, Takamaro.
  • Shenai, Krishna.
  • Society of Photo-optical Instrumentation Engineers.
Description
ix, 344 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 1805
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 1805.
Subject
  • Integrated circuits > Design and construction > Congresses
  • Metallic films > Congresses
  • Metallizing > Congresses
  • Electrodiffusion > Congresses
  • Semiconductor-metal boundaries > Congresses
Bibliography (note)
  • Includes bibliographies and author index.
ISBN
0819410039 (pbk.)
LCCN
92062654
OCLC
ocm28271722
Owning Institutions
Columbia University Libraries