Research Catalog

Advanced metallization for ULSI applications.

Title: Advanced metallization for ULSI applications.
Publication: Pittsburgh, Pa. : Materials Research Society, 1992-

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5 Items

Item details
Status	Vol/Date	Format	Access	Call Number	Item Location
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	1994	Text	Request in advance	TK7871.15.T85 W66 1994	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	1993	Text	Request in advance	TK7871.15.T85 W66 1993	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	1992	Text	Request in advance	TK7871.15.T85 W66 1992	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	1992	Text	Request in advance	TK7871.15.T85 W66 1992	Off-site
Request for On-site Use Request Scan How do I pick up this item and when will it be ready?	1991	Text	Request in advance	TK7871.15.T85 W66 1991	Off-site

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Details

Additional Authors

Advanced Metallization for ULSI Applications Conference (1994 : Austin, Tex.)

Publication Date

1991-
Ceased with 1994.

Description

volumes : illustrations; 23 cm

Subjects

Issued By (note)

Contains papers presented at annual conference; in 1994: Advanced Metallization for ULSI Applications Conference.

ISSN

1048-0854 (incorrect)

OCLC

ocm28611872
SCSB-3062317

Owning Institutions

Columbia University Libraries