Research Catalog

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I

Title
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing I / edited by Dennis N. Schmidt ; assistant editors, David Reedy, Alex Schwarz.
Author
Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing (1st : 1992 : Toronto, Ont.)
Publication
Pennington, N.J. : Electrochemical Society, [1992], ©1992.

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Details

Additional Authors
  • Schmidt, Dennis N.
  • Reedy, David.
  • Schwarz, Alex.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectric Science and Technology Division.
Description
x, 501 pages : illustrations; 23 cm.
Series Statement
Proceedings / The Electrochemical Society, Inc. ; v. 92-21
Uniform Title
Proceedings (Electrochemical Society) ; v. 92-21.
Alternative Title
Contamination control and defect reduction in semiconductor manufacturing I.
Subject
  • Semiconductors > Design and construction > Congresses
  • Semiconductors > Defects > Congresses
Note
  • "Electronics and Dielectric Science and Technology Divisions."
  • Spine title: Contamination control and defect reduction in semiconductor manufacturing I.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
156677022X
LCCN
92073946
OCLC
  • 27865455
  • ocm27865455
Owning Institutions
Columbia University Libraries