Research Catalog

Introduction to VLSI process engineering

Title
Introduction to VLSI process engineering / edited by the Society of Chemical Engineers of Japan ; editor in chief, Yuji Naka.
Publication
London ; New York : Chapman & Hall, 1993.

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Details

Additional Authors
  • Naka, Yūji, 1945-
  • Kagaku Kōgaku Kyōkai (Japan)
Description
xiii, 210 pages : illustrations; 24 cm
Subject
  • Integrated circuits > Design and construction
  • Manufacturing processes
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
0412395509 (alk. paper)
LCCN
92045674
OCLC
  • 27434850
  • ocm27434850
Owning Institutions
Columbia University Libraries