Research Catalog

Materials aspects of x-ray lithography : symposium held April 12-14, 1993

Title
Materials aspects of x-ray lithography : symposium held April 12-14, 1993 / edited by George K. Celler and Juan R. Maldonado.
Publication
Pittsburgh, PA : Materials Research Society, 1993.

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Details

Additional Authors
  • Celler, George K.
  • Maldonado, Juan R.
  • Materials Research Society.
Description
xi, 291 pages : illustrations; 24 cm.
Series Statement
Materials Research Society symposium proceedings, 0272-9172 ; v. 306
Uniform Title
Materials Research Society symposia proceedings ; v. 306.
Subject
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1558992022
LCCN
93034352
OCLC
  • 502423913
  • ocn502423913
Owning Institutions
Columbia University Libraries