Research Catalog

IEEE/SEMI International Semiconductor Manufacturing Science Symposium [ISMSS] : San Francisco Marriott Hotel, San Francisco, California; conference July 19-20, workshops July 18 & 21 [1993]; held in conjunction with SEMICON/West 93 July 20-22

Title
IEEE/SEMI International Semiconductor Manufacturing Science Symposium [ISMSS] : San Francisco Marriott Hotel, San Francisco, California; conference July 19-20, workshops July 18 & 21 [1993]; held in conjunction with SEMICON/West 93 July 20-22 / Sponsored by Semiconductor Equipment and Materials International [and others].
Author
IEEE/SEMI International Semiconductor Manufacturing Science Symposium (5th : 1993 : San Francisco, Calif.)
Publication
Piscataway, NJ : Institute of Electrical and Electronics Engineers, [1993], ©1993.

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Details

Additional Authors
Semiconductor Equipment and Materials International.
Description
151 pages : illustrations; 28 cm
Alternative Title
ISMSS 93 Proceedings.
Subjects
Note
  • Spine title: ISMSS '93 proceedings.
  • "IEEE catalog number 93CH3280-5"--T.p. verso.
Bibliography (note)
  • Includes bibliographical references.
Contents
  • Overview of SEMI -- Overview of the IEEE -- Where Must Semiconductor Manufacturing Go? / Gil Amelio -- Programmable Factory for IC Manufacturing for the 21[superscript st] Century / Krishna C. Saraswat -- Uniformity Measures in Semiconductor Manufacturing / Arnon Max Hurwitz -- Reporting Process Capability: Everything You Always Wanted to Know, Many Things You Might Not Want to Hear / Madhukar Joshi -- In Situ Particle Monitoring in a Single Wafer Polysilicon and Silicon Nitride Etch System / Bobby Busselman, Tim Emery, Kirk Staker, Karl Heiman, Don Tran, Martin Elzingre and Richard J. Markle -- Diagnostic Monitoring of Photoresist Ashing / Jerry A. Stefani, Lee M. Loewenstein and Michael Sullivan -- Factors Affecting the Temperature Stability of APCVD Systems in a Rapidly Changing Semiconductor Manufacturing Environment / Mansour Moinpour, Karen Lubic, Bau Nguyen and Farhad Moghadam -- A Prospectus for Gigascale Integration (GSI) / James D. Meindl.
  • A State-of-the-Art Automation System of an ASIC Wafer Fab in Japan / Akira Matsuyama and Jesse Niou -- Key Factors in Designing a Manufacturing Line to Maximize Tool Utilization and Minimize Turn-Around Time / Donald P. Martin -- The Development and Implementation of SEMATECH Strategic Cell Controller (SCC) Framework at National Semiconductor Company / Kevin Nguyen -- Particle Concentrations Over Production Tools During Processing: A Comparison of Facilities Worldwide / Salem Abuzeid -- Configuration and Management Strategies for Cluster-Based Fabs / Samuel C. Wood and Krishna C. Saraswat -- International Partnerships / Roger Emerick -- A Method for Accelerating Cycles of Learning in the Semiconductor Equipment Industry / Ed Keller and Jeff Bukhman -- Partnering Works: A Case in Point / G. Actor, J. Fair, R. McFarland, P. Patterson, S. Voiss, J. Schlueter, R. Schultz and S.-Q. Wang -- Building Effective Alliances / Corning F. Painter.
  • A Joint Partnership for Improving Undergraduate Microelectronics Instruction / Robert J. Feugale, Jr. and C. Wayne Umbaugh -- Large-Scale Business Process Improvement: Reducing Total Make-to-Market Cycle Time / David Kirjassoff -- A Roadmap for the Implementation of Total Productive Maintenance (TPM) in a Semiconductor Manufacturing Operation / Hussein Naguib -- Product Evolution vs. Product Revolution: Maximizing Continuous Improvement While Minimizing Risk / Eric A. Englhardt -- How to Implement a Customer Satisfaction Survey to Drive your MIS Organization / Steven D. Aulds -- Due Window Scheduling for IC Sort and Test with Precedence Constrains via Lagrangian Relaxation / Tsung-Rian Chen, Cheng-Wu Chen, Jen Kao, Stephen Christensen and Eric Scheidtmann -- A Neural Network Based Approach for Surveillance and Diagnosis of Statistical Parameters in the IC Manufacturing Process / Wei Zhang and Linda Milor.
  • Concurrent Deployment of Run-by-Run Controller Using SCC Framework / Albert Hu, Kevin Nguyen, Steve Wong, Xiuhua Zhang, Emanuel Sachs and Peter Rentein -- Yield Models in a Design-for-Manufacturability Environment: A Bibliography / Gary Cheek and Geoff O'Donoghue -- SEMI Publications, Standards, Videos, Network -- Past ISMSS, ASMC Proceedings - Order Form -- IEEE Membership Information.
ISBN
0780312120 (softbound)
LCCN
93077244
OCLC
ocm29717866
Owning Institutions
Columbia University Libraries