Research Catalog

Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robotic systems : proceedings

Title
Micro electro mechanical systems : an investigation of micro structures, sensors, actuators, machines and robotic systems : proceedings / IEEE, Oiso, Japan, January 25-28, 1994 ; sponsored by the IEEE Robotics and Automation Society in cooperation with the ASME Dynamic Systems and Control Division and the Micromachine Center.
Publication
[New York] : Institute of Electrical and Electronics Engineers, 1994.

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Details

Additional Authors
  • IEEE Robotics and Automation Society.
  • American Society of Mechanical Engineers. Dynamic Systems and Control Division.
  • Micromachine Center.
  • IEEE Workshop on Micro Electro Mechanical Systems (1994 : Ōiso-machi, Japan)
Description
xiv, 360 pages : illustrations; 28 cm
Alternative Title
  • 1994 IEEE micro electro mechanical systems.
  • MEMS '94.
Subject
  • Electromechanical devices > Congresses
  • Microelectronics > Congresses
  • Detectors > Congresses
  • Actuators > Congresses
  • Robotics > Congresses
Note
  • "1994 IEEE Workshop on Micro Electro Mechanical Systems (MEMS)"--P. iii.
  • "IEEE catalog number 94CH3404-1"--T.p. verso.
  • Cover title: 1994 IEEE micro electro mechanical systems.
Bibliography (note)
  • Includes bibliographical references and index.
ISBN
  • 078031834X (casebound)
  • 0780318331 (softbound)
  • 0780318358 (microfiche)
OCLC
  • 32674959
  • ocm32674959
Owning Institutions
Columbia University Libraries