Research Catalog

Optical/laser microlithography VII : 2-4 March 1994, San Jose, California

Title
Optical/laser microlithography VII : 2-4 March 1994, San Jose, California / Timothy A. Brunner, chair/editor ; sponsored and published by SPIE--the International Society for Optical Engineering ; cooperating organization, SEMI--Semiconductor Equipment and Materials International.
Publication
Bellingham, Wash., USA : SPIE, [1994], ©1994.

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Details

Additional Authors
  • Brunner, Timothy A.
  • Society of Photo-optical Instrumentation Engineers.
  • Semiconductor Equipment and Materials International.
Description
xiii, 1008 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 2197
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2197.
Alternative Title
  • Optical laser microlithography VII
  • Optical/laser microlithography 7.
  • Optical/laser microlithography seven.
Subject
  • Microlithography > Congresses
  • Masks (Electronics) > Congresses
  • Optical instruments > Congresses
  • Lasers > Industrial applications > Congresses
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819414921 (pbk.)
LCCN
94065792
OCLC
ocm30602250
Owning Institutions
Columbia University Libraries