Research Catalog

Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California

Title
Microelectronic processes, sensors, and controls : 27-29 September 1993, Monterey, California / James A. Bondur [and others], chairs/editors ; sponsored and published by SPIE--the International Society for Optical Engineering.
Publication
Bellingham, Wash., USA : SPIE, [1994], ©1994.

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Details

Additional Authors
  • Bondur, James.
  • Society of Photo-optical Instrumentation Engineers.
Description
viii, 462 pages : illustrations; 28 cm.
Series Statement
Proceedings / SPIE--the International Society for Optical Engineering ; v. 2091
Uniform Title
Proceedings of SPIE--the International Society for Optical Engineering ; v. 2091.
Subject
  • Integrated circuits > Design and construction > Congresses
  • Semiconductors > Design and construction > Congresses
  • Integrated circuits > Heat treatment > Congresses
  • Plasma etching > Congresses
  • Optical detectors > Congresses
Bibliography (note)
  • Includes bibliographical references and author index.
ISBN
0819413625 (pbk.) (canceled/invalid)
LCCN
93086455
OCLC
ocm29985268
Owning Institutions
Columbia University Libraries