Research Catalog

Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

Title
Proceedings of the Third International Symposium on Cleaning Technology in Semiconductor Device Manufacturing / edited by Jerzy Ruzyllo, Richard E. Novak ; assistant editors, A. Bowling [and others] ; [sponsored by the] Electronics and Dielectric Science and Technology Divisions.
Author
International Symposium on Cleaning Technology in Semiconductor Device Manufacturing (3rd : 1993 : New Orleans, La.)
Publication
Pennington, NJ : Electrochemical Society, [1994], ©1994.

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Details

Additional Authors
  • Rużyłło, Jerzy.
  • Novak, Richard E.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectric Science and Technology Division.
Description
xiii, 604 pages : illustrations; 23 cm.
Series Statement
Proceedings ; v. 94-7
Uniform Title
Proceedings (Electrochemical Society) ; v. 94-7.
Alternative Title
Cleaning technology in semiconductor device manufacturing.
Subject
Note
  • Spine title: Cleaning technology in semiconductor device manufacturing.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1566770386
LCCN
93072867
OCLC
ocm30859113
Owning Institutions
Columbia University Libraries