Research Catalog

Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II

Title
Proceedings of the Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing II / edited by R. Novak[and others].
Author
Symposium on Contamination Control and Defect Reduction in Semiconductor Manufacturing (2nd : 1993 : Honolulu, Hawaii)
Publication
Pennington, N.J. : Electrochemical Society, [1994], ©1994.

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Details

Additional Authors
  • Novak, Richard E.
  • Electrochemical Society. Electronics Division.
  • Electrochemical Society. Dielectric Science and Technology Division.
Description
ix, 353 pages : illustrations; 23 cm.
Series Statement
Proceedings ; v. 94-3
Uniform Title
Proceedings (Electrochemical Society) ; v. 94-3.
Alternative Title
Contamination control and defect reduction in semiconductor manufacturing II.
Subjects
Note
  • "Electronics and Dielectric Science and Technology Divisions."
  • Spine title: Contamination control and defect reduction in semiconductor manufacturing II.
Bibliography (note)
  • Includes bibliographical references and indexes.
ISBN
1566770653
LCCN
94175219
OCLC
ocm30639494
Owning Institutions
Columbia University Libraries