Research Catalog
Integrating reliability into microelectronics manufacturing
- Title
- Integrating reliability into microelectronics manufacturing / Aris Christou.
- Author
- Christou, A.
- Publication
- Chichester ; New York : Wiley, [1994], ©1994.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
| Text | Request in advance | TK7874 .C5448 1994 | Off-site |
Holdings
Details
- Description
- xii, 349 pages : illustrations; 25 cm.
- Series Statement
- Design and measurement in electronic engineering
- Uniform Title
- Design and measurement in electronic engineering.
- Subjects
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- 1. Microelectronics Industry and Manufacturing Trends in Reliability -- 2. Dual Use Microelectronics: A Reliability Approach -- 3. Manufacturing Yield and Reliability -- 4. Manufacturing of Microcircuits -- 5. Crystal Growth and Substrate Mechanisms -- 6. Oxidation and Dielectrics in Microcircuit Processing -- 7. Reliable Active Layer Doping by Diffusion and Ion Implantation -- 8. Pattern Transfer in Microcircuit Manufacturing -- 9. Metallizations for Devices and Circuits -- 10. Device Packaging and Microcircuit Characterization -- 11. Manufacturing of Plastic Integrated Circuits -- 12. Manufacturing of Microelectromechanical Systems and Computer Aided Control of Micromachining -- 13. Manufacturing of Electronic Packages by Industrial Robots -- 14. Manufacturing of Microwave Substrates for Packaging of Monolithic Microwave Circuits.
- ISBN
- 0471944076 :
- 0471944084 (pbk.) :
- LCCN
- 93043467
- OCLC
- 29357303
- ocm29357303
- Owning Institutions
- Columbia University Libraries