Research Catalog

Ion implantation : basics to device fabrication

Title
Ion implantation : basics to device fabrication / by Emanuele Rimini.
Author
Rimini, E.
Publication
Boston : Kluwer Academic Publishers, [1995], ©1995.

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TextRequest in advance QC702.7.I55 R56 1995Off-site

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Details

Description
xii, 393 pages : illustrations; 25 cm.
Series Statement
The Kluwer international series in engineering and computer science ; SECS 293. Electronic materials, science and technology
Uniform Title
  • Kluwer international series in engineering and computer science ; SECS 293.
  • Kluwer international series in engineering and computer science. Electronic materials, science and technology.
Subjects
Bibliography (note)
  • Includes bibliographical references (p. [359]-378) and index.
Contents
Ch. 1. Semiconductor Devices -- Ch. 2. Ion Implanters -- Ch. 3. Range Distribution -- Ch. 4. Radiation Damage -- Ch. 5. Annealing and Secondary Defects -- Ch. 6. Analytical Techniques -- Ch. 7. Silicon Based Devices -- Ch. 8. Ion Implantation in Compound Semi-Conductor and Buried Layer Synthesis.
ISBN
0792395204 (acid-free paper)
LCCN
94034251
OCLC
  • 31171598
  • ocm31171598
Owning Institutions
Columbia University Libraries