Research Catalog

Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films

Title
Proceedings of the Third Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films / edited by Vik J. Kapoor, William D. Brown ; [sponsored by the] Dielectic Science and Technology and Electronics Divisions.
Author
Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films (3rd : 1994 : San Francisco, Calif.)
Publication
Pennington, NJ (10 S. Main St., Pennington 08534-2696 : Electrochemical Society), [1994], ©1994.

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Details

Additional Authors
  • Kapoor, Vikram J.
  • Brown, William D., 1943-
  • Electrochemical Society. Dielectric Science and Technology Division.
  • Electrochemical Society. Electronics Division.
Description
xiii, 625 pages : illustrations; 24 cm.
Series Statement
Proceedings (Electrochemical Society) ; v. 94-16
Uniform Title
Proceedings (Electrochemical Society) ; v. 94-16.
Alternative Title
Silicon nitride and silicon dioxide thin insulating films.
Subjects
Bibliography (note)
  • Includes bibliographies and indexes.
ISBN
1566770483
LCCN
94070848
OCLC
  • 31520974
  • ocm31520974
Owning Institutions
Columbia University Libraries