Research Catalog
Cold plasma in materials fabrication : from fundamentals to applications
- Title
- Cold plasma in materials fabrication : from fundamentals to applications / Alfred Grill.
- Author
- Grill, Alfred.
- Publication
- Piscataway, NJ : IEEE Press ; New York : Institute of Electrical and Electronics Engineers, [1994], ©1994.
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Request in advance | TA2020 .G75 1994 | Off-site |
Holdings
Details
- Description
- xiii, 257 pages : illustrations; 24 cm
- Subject
- Bibliography (note)
- Includes bibliographical references and index.
- Contents
- 1. Fundamentals of Plasma -- 2. Cold Plasma Generation -- 3. Plasma Chemistry -- 4. Plasma Reactors -- 5. Plasma Diagnostics -- 6. Cold Plasma Processes for Surface Modification -- 7. Deposition of Coatings by PECVD -- 8. Plasma Assisted Etching.
- ISBN
- 0780310551
- LCCN
- 93042135
- OCLC
- 29477985
- ocm29477985
- Owning Institutions
- Columbia University Libraries