Research Catalog

Laser-assisted microtechnology

Title
Laser-assisted microtechnology / Simeon M. Metev, Vadim P. Veiko.
Author
Metev, S. M. (Simeon Metodiev)
Publication
Berlin ; New York : Springer-Verlag, [1994], ©1994.

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Details

Additional Authors
Veĭko, V. P. (Vadim Pavlovich)
Description
x, 240 pages : illustrations; 25 cm.
Series Statement
Springer series in materials science ; 19
Uniform Title
Springer series in materials science ; v. 19.
Subjects
Bibliography (note)
  • Includes bibliographical references (p. 221-238) and index.
Contents
1. Introduction -- 2. Laser-Based Equipment for Microtechnology -- 3. Laser Micromachining of Thin Films -- 4. Local Laser-Induced Heat Treatment -- 5. Laser Melting and Microwelding -- 6. Laser Microshaping -- 7. Maskless Laser Micropatterning -- 8. Pulsed Laser-Plasma Deposition of Thin Films and Film Structures.
ISBN
  • 3540539255 (Berlin : acid-free paper)
  • 0387539255 (New York : acid-free paper)
LCCN
94025834
OCLC
  • 30594581
  • ocm30594581
Owning Institutions
Columbia University Libraries