Research Catalog
Laser-assisted microtechnology
- Title
- Laser-assisted microtechnology / Simeon M. Metev, Vadim P. Veiko.
- Author
- Metev, S. M. (Simeon Metodiev)
- Publication
- Berlin ; New York : Springer-Verlag, [1994], ©1994.
Items in the Library & Off-site
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1 Item
| Status | Format | Access | Call Number | Item Location |
|---|---|---|---|---|
Not available - Please for assistance. | Text | Request in advance | TK7836 .M467 1994 | Off-site |
Holdings
Details
- Additional Authors
- Veĭko, V. P. (Vadim Pavlovich)
- Description
- x, 240 pages : illustrations; 25 cm.
- Series Statement
- Springer series in materials science ; 19
- Uniform Title
- Springer series in materials science ; v. 19.
- Subjects
- Bibliography (note)
- Includes bibliographical references (p. 221-238) and index.
- Contents
- 1. Introduction -- 2. Laser-Based Equipment for Microtechnology -- 3. Laser Micromachining of Thin Films -- 4. Local Laser-Induced Heat Treatment -- 5. Laser Melting and Microwelding -- 6. Laser Microshaping -- 7. Maskless Laser Micropatterning -- 8. Pulsed Laser-Plasma Deposition of Thin Films and Film Structures.
- ISBN
- 3540539255 (Berlin : acid-free paper)
- 0387539255 (New York : acid-free paper)
- LCCN
- 94025834
- OCLC
- 30594581
- ocm30594581
- Owning Institutions
- Columbia University Libraries