Research Catalog
Radio-frequency capacitive discharges
- Title
- Radio-frequency capacitive discharges / Yuri P. Raizer, Mikhail N. Shneider, Nikolai A. Yatsenko.
- Author
- Raĭzer, I͡U. P. (I͡Uriĭ Petrovich)
- Publication
- Boca Raton : CRC Press, [1995], ©1995.
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Status | Format | Access | Call Number | Item Location |
---|---|---|---|---|
Text | Request in advance | QC711.8.R35 R35 1995 | Off-site |
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Details
- Additional Authors
- Description
- xii, 292 pages : illustrations; 24 cm
- Subject
- Note
- Translation from Russian.
- Bibliography (note)
- Includes bibliographical references (p. 271-289) and index.
- Contents
- 1. Basic principles of the RF capacitive discharge -- 2. Moderate-pressure RF discharges -- 3. Low-pressure RF discharges and asymmetry effects -- 4. Experimental methods and measurements -- 5. Application of RF capacitive discharges for gas laser excitation and plasma technology.
- ISBN
- 0849386446 (acid-free paper)
- LCCN
- 94048594
- OCLC
- 31938541
- ocm31938541
- Owning Institutions
- Columbia University Libraries